Applied to process equipment in areas such as CMP, WET, DF and Track

Applicable to equipment with no specific requirements for vibration or stiffness, and with a load ranging from 700 to 1500 kg/m² while the equipment feet bear loads greater than 700kg/in2. The raised floor cannot support this weight and therefore requires the use of channel steel or H-beams to make steel structures, with steel plates laid on top for load-bearing.